MOCVD approach to perovskite based thin films: From high Tc superconductors to giant dielectric constant materials
نویسندگان
چکیده
Perovskite thin films with various functional properties have been synthesized through the Metal Organic Chemical Vapour Deposition (MOCVD). The MOCVD processes, used for the fabrication of a variety of advanced materials in thin film form, rely upon application of a molten multi-element source. The challenging in-situ strategy involves the use of a molten source consisting of a second-generation M(hfa)n•polyether (M = La, Ca, and Y; polyether = diglyme or tetraglyme) precursor which acts as a solvent for the other species. The approach is reported as a general route to the fabrication of multi-element oxides.
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